1

Surfactants in Controlling Removal Rates and Selectivity in Barrier Slurry for Cu CMP

Year:
2007
Language:
english
File:
PDF, 115 KB
english, 2007
6

Phase separation in short-chain lecithin/gel-state long chain lecithin aggregates

Year:
1990
Language:
english
File:
PDF, 986 KB
english, 1990
8

Removal of TaN/Ta Barrier with Variable Selectivity to Copper and TEOS

Year:
2002
Language:
english
File:
PDF, 49 KB
english, 2002